Miniature and Micro Mass Spectrometry for Nanoscale Sensing Applications: An Overview

Authors

  • S. Taylor Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, England, UK.
  • N. France Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, England, UK.

DOI:

https://doi.org/10.9734/bpi/nupsr/v14/10189D

Keywords:

Miniature mass spectrometers, harsh environment MS, microfabrication, gas analysis, environmental monitoring

Abstract

The utilisation of miniature and/or microscale versions of more common mass spectrometers has been realised in recent years. As a result, portable analytical instruments have been developed for a variety of 'in the field' sensing applications in aerospace, environmental monitoring, medical diagnostics, and process control. The ideas that govern the development of miniature quadrupole mass spectrometers are analyzed in this chapter. In the range of 1-100 Da, two alternative microfabrication processes are compared to a traditional QMS utilised for residual gas analysis. The underlying principles of QMS operation are presented and two fabrication methods for miniature QMS realisation are described.

Published

2021-08-10

How to Cite

S. Taylor, & N. France. (2021). Miniature and Micro Mass Spectrometry for Nanoscale Sensing Applications: An Overview. Newest Updates in Physical Science Research Vol. 14, 147–153. https://doi.org/10.9734/bpi/nupsr/v14/10189D

Issue

Newest Updates in Physical Science Research Vol. 14

Section

Chapters