Divya GUPTA; Sanjeev AGGARWAL. Oblique Ar+ Sputtering Induced Defects and Structural Transformation in Si (111). Recent Progress in Science and Technology Vol. 4, [S. l.], p. 73–91, 2023. DOI: 10.9734/bpi/rpst/v4/18265D. Disponível em: https://stm.bookpi.org/RPST-V4/article/view/9443. Acesso em: 4 jun. 2026.