Electroelastic Actuator of Nanomechatronics Systems for Nanoscience

Abstract

Structural-parametric model, decision linear ordinary second-order differential equation, parametric structural schematic diagram, transfer functions of the electroelastic actuator of mechatronics systems for nanoscience are obtained. Effects of geometric and physical parameters of the piezoactuator and the external load on its dynamic characteristics are determined. The parametric structural schematic diagram and the transfer functions of the piezoactuator for the transverse, longitudinal, shift piezoelectric effects are obtained from the structural-parametric model of the piezoactuator. For calculation of the control systems for nanotechnology with the piezoactuator its the parametric structural schematic diagram and the transfer functions are determined. The generalized parametric structural schematic diagram of the electroelastic actuator is constructed.