R. Siddheswaran, Rostislav Medlin, Pavel Calta and C. Esther Jeyanthi. TEM Cross-Section Sample (XTEM) Preparation of nc-Si/a-SiO2 Multi-Layer Thin Film Using cryo Ar+ Ion Slicing for Microstructural Analyses. RACMS-V2 [Internet]. 2022 Jul. 8 [cited 2026 Jun. 18];:25-36. Available from: https://stm.bookpi.org/RACMS-V2/article/view/7627