R. Siddheswaran, Rostislav Medlin, Pavel Calta, and C. Esther Jeyanthi, “TEM Cross-Section Sample (XTEM) Preparation of nc-Si/a-SiO2 Multi-Layer Thin Film Using cryo Ar+ Ion Slicing for Microstructural Analyses”, RACMS-V2, pp. 25–36, Jul. 2022.