R. SIDDHESWARAN; Rostislav MEDLIN; Pavel CALTA; C. Esther JEYANTHI. TEM Cross-Section Sample (XTEM) Preparation of nc-Si/a-SiO2 Multi-Layer Thin Film Using cryo Ar+ Ion Slicing for Microstructural Analyses. Research Aspects in Chemical and Materials Sciences Vol. 2, [S. l.], p. 25–36, 2022. DOI: 10.9734/bpi/racms/v2/3260B. Disponível em: https://stm.bookpi.org/RACMS-V2/article/view/7627. Acesso em: 18 jun. 2026.