R. Siddheswaran et al. 2022. TEM Cross-Section Sample (XTEM) Preparation of nc-Si/a-SiO2 Multi-Layer Thin Film Using cryo Ar+ Ion Slicing for Microstructural Analyses. Research Aspects in Chemical and Materials Sciences Vol. 2. (Jul. 2022), 25–36. DOI:https://doi.org/10.9734/bpi/racms/v2/3260B.