A. Ricard, M. Chaker and M. Tabbal. Effect of the HF Wave Frequency in the N-atom Production in \(N_2\) HF Plasmas: Application to CN Thin Films Deposition. PAWNST-E3 [Internet]. 2023 Apr. 20 [cited 2026 Jun. 4];:120-37. Available from: https://stm.bookpi.org/PAWNST-E3/article/view/10329