Ricard , A., T. Belmonte, T. Czerwiec, and S. Konstantinidis. 2022. “Remote Plasmas CVD and Reactive Sputtering in Magnetron Plasmas”. Plasmas Afterglows With \(N_2\) for Surface Treatments- Edition 2, July, 155-68. https://doi.org/10.9734/bpi/mono/978-93-5547-643-2/CH16.