A. Ricard, T. Belmonte, T. Czerwiec, & S. Konstantinidis. (2022). Remote Plasmas CVD and Reactive Sputtering in Magnetron Plasmas. Plasmas Afterglows With \(N_2\) for Surface Treatments- Edition 2, 155–168. https://doi.org/10.9734/bpi/mono/978-93-5547-643-2/CH16