Time Varying Plasmas and Afterglows for Surface Treatments

Authors

  • A. Ricard LAPLACE, Univ. Toulouse, CNRS, 118 route de Narbonne 31062 Toulouse, France.
  • F. Massines PROMES - CNRS, Rambla de la Thermodynamique, 66100 Perpignan, France.
  • S. Konstantinidis Plasma-surface interaction Chemistry, CIRMAP, Res. Inst. Materials Sc. and Eng., Univ. of Mons, 25 place du Parc , B-7000 Mons, Belgium.

DOI:

https://doi.org/10.9734/bpi/mono/978-93-5547-643-2/CH15

Keywords:

Time varying Ar and N2 plasmas and afterglows, DC, RF, DBD, magnetron plasma, Ar and N2 metastables atoms and molecules

Abstract

Time varying discharges and afterglows have been studied in Ar and  gases for several types of discharge structures (DC, RF, DBD, magnetron) at different gas pressures from a few mTorr to the atmospheric gas pressure. It has been discussed the effects of reactions between metastable atoms ) and from molecules (  in long time  range  and short time  range  afterglows in the excitations of Ar high radiative levels, ) level and  bands. Strong emissions of and -atoms ( when  was added to  in short time  range , low Ar pressure  pulsed DC magnetron plasmas which were associated to hard  coatings.

Published

2022-07-26

How to Cite

A. Ricard, F. Massines, & S. Konstantinidis. (2022). Time Varying Plasmas and Afterglows for Surface Treatments. Plasmas Afterglows With \(N_2\) for Surface Treatments- Edition 2, 139–154. https://doi.org/10.9734/bpi/mono/978-93-5547-643-2/CH15

Issue

Plasmas Afterglows with \(N_2\) for Surface Treatments- Edition 2

Section

Contents