Determination of N and O-atoms, of N2(A) and N2(X,v>13) Metastable Molecules and N2+ ion Densities in the Ar-N2 Afterglows Jets of Microwave Discharges

Authors

  • A. Ricard LAPLACE , Univ. Toulouse, CNRS, 118 route de Narbonne 31062 Toulouse, France.
  • H. Zerrouki Université de Toulouse; CNRS; LAPLACE 118 route de Narbonne, F-31062 Toulouse cedex 9, France.
  • J. P. Sarrette Université de Toulouse; CNRS; LAPLACE 118 route de Narbonne, F-31062 Toulouse cedex 9, France.

DOI:

https://doi.org/10.9734/bpi/mono/978-93-5547-643-2/CH12

Keywords:

Ar-N2 microwave discharge, afterglow jets, N-atoms, N2 metastables, N2 ions

Abstract

Afterglow jets of Ar-N2 flowing microwave discharges are characterized by optical emission spectroscopy. The  and  atoms, the  and  metastable molecules and ion densities are determined after calibration by  titration for  and -atoms and measurements of  and  band intensities. For an Ar-xN2 gas mixture with  increasing from 2 to  at 4 Torr , 100 Watt and an afterglow time of  at the 5 liter reactor inlet, it is found densities in the ranges of  for  - atoms, one order of magnitude lower for ) and for 0 - atoms (coming from air impurity), of  for  and of  for .

Afterglow jets of Ar-N2 flowing microwave discharges are characterized by optical emission spectroscopy. The  and  atoms, the  and  metastable molecules and ion densities are determined after calibration by  titration for  and -atoms and measurements of  and  band intensities. For an Ar-xN2 gas mixture with  increasing from 2 to  at 4 Torr , 100 Watt and an afterglow time of  at the 5 liter reactor inlet, it is found densities in the ranges of  for  - atoms, one order of magnitude lower for ) and for 0 - atoms (coming from air impurity), of  for  and of  for .

Published

2022-07-26

How to Cite

A. Ricard, H. Zerrouki, & J. P. Sarrette. (2022). Determination of N and O-atoms, of N2(A) and N2(X,v>13) Metastable Molecules and N2+ ion Densities in the Ar-N2 Afterglows Jets of Microwave Discharges. Plasmas Afterglows With \(N_2\) for Surface Treatments- Edition 2, 49–60. https://doi.org/10.9734/bpi/mono/978-93-5547-643-2/CH12