Plasmas Afterglows with N2 for Surface Treatments- Edition 2
DOI:
https://doi.org/10.9734/bpi/mono/978-93-5547-643-2/CH0Keywords:
DC, RF, Microwave, magnetron, corona and DBD plasmas and afterglows, atoms, molecules and ions, low and atmospheric gas pressures, Ti nitridingAbstract
This book reports new results following the 1st Book of the 2021 edition. References to chapters of the 2021 edition are given in the present edition with the development of new results.
Several plasmas and afterglows are described: DC positive column, RF and microwave discharges at reduced gas pressure and Corona, DBD discharges at atmospheric gas pressure.
N2 is the dominant used gas where the production of N-atoms in the studied plasmas allows to determine their absolute density by the NO titration method and then to deduce the densities of numerous excited species by the line intensity ratio method.
The reported chapters of this 2nd edition are also devoted to various results of fundamental processes as for the ArM metastable excitation and destruction by electron collisions, gas temperature measurements by optical spectroscopy, time varying discharges and spatial resolution in the discharge tube. Several applications are described as the Ti nitriding by magnetron plasmas and HF flowing afterglows.
