André Ricard, Jayr Amorim, Moustapha Abdeladim, Jean-Philippe Sarrette and Yu-Kwon Kim. N, H and C-atoms Concentrations in Flowing Afterglows of Microwave R/N\(_2\)-H\(_2\) and R/N\(_2\)-CH\(_4\) Discharges with R=N\(_2\), He, Ar and Their Applications to TiO\(_2\) Surface Nitriding. PANST [Internet]. 2025 Mar. 26 [cited 2026 Jul. 28];:489-535. Available from: https://stm.bookpi.org/PANST/article/view/17729