André Ricard, Jean-Philippe Sarrette, Soo-Ghee Oh and Yu-Kwon Kim. A Detailed Comparison between RF and Microwave Afterglows in N\(_2\) Gas Mixtures for Surface Nitriding of TiO\(_2\) Films. PANST [Internet]. 2025 Mar. 26 [cited 2026 Jul. 28];:451-88. Available from: https://stm.bookpi.org/PANST/article/view/17727