André Ricard, Thierry Belmonte, Thierry Czerwiec and Stephanos Konstantinidis. Remote Plasmas Chemical Vapour Deposition and Reactive Sputtering in Magnetron Plasmas. PANST [Internet]. 2025 Mar. 26 [cited 2026 Jul. 28];:253-67. Available from: https://stm.bookpi.org/PANST/article/view/17711