Time-Resolved Studies of Plasmas and Afterglows for Material Surface Treatments
DOI:
https://doi.org/10.9734/bpi/mono/978-93-49473-93-5/CH4Keywords:
Time-varying Ar and N2 plasmas and afterglows, DC, RF, DBD, magnetron plasma, Ar and N2 metastables atoms and moleculesAbstract
Time-varying discharges and afterglows have been studied in Ar and N2 gases for several types of discharge structures (DC, RF, DBD, magnetron) at different gas pressures from a few mTorr to the atmospheric gas pressure. Pulsed DC plasmas were performed in N2 and N2 - H2 for steel cathode nitriding. Pulsed RF plasmas and afterglows have been studied in Ar and Ar-N2 with an experimental setup. Both Glow Dielectric Barrier Discharge and Townsend Dielectric Barrier Discharge discharges are homogeneous or diffuse DBDs, free of streamer and microdischarge, and convenient to active polymer It has discussed the effects of reactions between metastable atoms (ArM) and from molecules (N2, A) in long (10-3 s range) and short (10-6 s range) time afterglows in the excitations of Ar high radiative levels, N2(C, v = 1) level and NO*, N2O* bands. Strong emissions of Ti+ and O-atoms when O2 was added to Ar in a short time (10-6 s range), low Ar pressure (10-3Torr) pulsed DC magnetron plasmas which were associated with hard TiO2 coatings.
