A. V. Semenov, A. A. Kozlovskyi, S. N. Skorik and D. V. Lubov. Gas Sensing Properties of Nanocrystalline Silicon Carbide Films: Experimental Results. IST-V5 [Internet]. 2022 Feb. 11 [cited 2026 Jun. 3];:18-25. Available from: https://stm.bookpi.org/IST-V5/article/view/5697