Semenov, A. V., A. A. Kozlovskyi, S. N. Skorik, and D. V. Lubov. “Gas Sensing Properties of Nanocrystalline Silicon Carbide Films: Experimental Results”. Innovations in Science and Technology Vol. 5 (February 11, 2022): 18–25. Accessed June 4, 2026. https://stm.bookpi.org/IST-V5/article/view/5697.