A. V. SEMENOV; A. A. KOZLOVSKYI; S. N. SKORIK; D. V. LUBOV. Gas Sensing Properties of Nanocrystalline Silicon Carbide Films: Experimental Results. Innovations in Science and Technology Vol. 5, [S. l.], p. 18–25, 2022. DOI: 10.9734/bpi/ist/v5/1816B. Disponível em: https://stm.bookpi.org/IST-V5/article/view/5697. Acesso em: 3 jun. 2026.