Junyang ZHANG. Process Optimization of Single-Step Photolithography: An Updated and Novel Approach. Fundamental Research and Application of Physical Science Vol. 2, [S. l.], p. 70–84, 2023. DOI: 10.9734/bpi/fraps/v2/9737F. Disponível em: https://stm.bookpi.org/FRAPS-V2/article/view/10149. Acesso em: 4 jun. 2026.