Shojiro Miyake, Mei Wang and Jongduk Kim. Determination of Silicon Nanofabrication Processes Using Atomic Force Microscopy (AFM). CAERT-V4 [Internet]. 2024 May 30 [cited 2026 Jun. 4];:132-67. Available from: https://stm.bookpi.org/CAERT-V4/article/view/14784