Shojiro MIYAKE; Mei WANG; Jongduk KIM. Determination of Silicon Nanofabrication Processes Using Atomic Force Microscopy (AFM). Current Approaches in Engineering Research and Technology Vol. 4, [S. l.], p. 132–167, 2024. DOI: 10.9734/bpi/caert/v4/492. Disponível em: https://stm.bookpi.org/CAERT-V4/article/view/14784. Acesso em: 4 jun. 2026.